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The School of Physics and Astronomy requires a UV nanoimprint lithography system with capability to replicate sub-micron scale structures in thin films of commercial photoresits, custom-designed photoresists and organic semiconductors. The system must have capability to align both nanoimprint stamps and photolithography masks to existing features on a sample.
The unit must come with toolings for holding both soft stamps for nanoimprint lithography and photomasks for conventional UV photolithography, and sample chucks suitable for a range of sample sizes from 10 mm x 10 mm chips to full wafers.
No supplier information available.
This procurement was divided into 1 lots, each awarded separately.
| Lot | Value | Status |
|---|---|---|
| Lot 1 90 days | £400,000 | active |
Published by the buyer on this notice. Check the original notice — details change and are not updated here.