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The EPSRC National Epitaxy Facility (NEF) based at the University of Sheffield has been providing bespoke semiconductor wafers to academia and industry for 45 years. It is a unique world-class centre combining technical excellence and expertise with state-of-the-art epitaxy and material characterization equipment.
We are looking to further enhance our capability provision to the UK semiconductor community, by investing in a new linked dual-chamber Molecular Beam Epitaxy (MBE) System for arsenides/phosphides and arsenides/antimonides growth that is fully automated, capable of 24/7 operation, reliable, and resource-efficient allowing further expansion in the future.
The system is replacing two existing VG reactors capable of 4" wafer growth of high-quality arsenides/phosphides and arsenides/antimonides, and should offer higher throughput thanks to automation of growth recipes for 24/7 operation, and integrated solutions allowing maintenance of critical components (such as ion gauges, cells) without breaking chamber vacuum.
This tender is divided into 2 Lots:
(Suppliers may bid for one or both Lots)
Lot 1 - MBE System
Lot 2 - In-situ monitoring equipment
Additional information: All tender documents, technical enquiries & tender returns, must be conducted via the In-tend portal, via the link shown above
| Supplier | Identifier | Award Value | Cross-References |
|---|---|---|---|
| DCA Instruments Oy | - | £4,750,000 | - |