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The University of Salford is looking to procure laser microlithography equipment that satisfies the following technical requirements:
⢠Be able to use ultraviolet light to create bespoke patterns on the surface of a wafer or chip
⢠Be able to handle small chips in addition to full sized wafers
⢠Be able to write large blocks of areas in one exposure (for example using a MEMS micromirror array). This means that laser lithography systems that use a single focused laser beam to write patterns pixel by pixel are not acceptable for this purchase
⢠Be able to align the chip/wafer using registration fiducial marks on the backside of the chip/wafer as well as on the front side.
⢠Have a minimum feature resolution less than 0.5 um
⢠Delivery deadline of November 2024
Please send any queries or quotations to …@salford.ac.uk by 12 noon on Friday 13th September 2024.
| Supplier | Identifier | Award Value | Cross-References |
|---|---|---|---|
| Durham Magneto Optics Ltd | 04492798 | £135,000 | - |